The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2018
Filed:
Aug. 18, 2014
Applicant:
Mitsubishi Chemical Corporation, Chiyoda-ku, JP;
Inventors:
Assignee:
MITSUBISHI CHEMICAL CORPORATION, Chiyoda-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
C11D 11/00 (2006.01); C11D 1/12 (2006.01); B08B 3/04 (2006.01); C11D 3/20 (2006.01); H01L 21/02 (2006.01); C11D 1/83 (2006.01); C11D 3/04 (2006.01); C11D 1/831 (2006.01); C11D 3/02 (2006.01); C11D 1/22 (2006.01); C11D 1/75 (2006.01);
U.S. Cl.
CPC ...
C11D 11/0047 (2013.01); B08B 3/04 (2013.01); C11D 1/12 (2013.01); C11D 1/83 (2013.01); C11D 1/831 (2013.01); C11D 3/02 (2013.01); C11D 3/044 (2013.01); C11D 3/2079 (2013.01); C11D 3/2082 (2013.01); H01L 21/02074 (2013.01); C11D 1/22 (2013.01); C11D 1/75 (2013.01);
Abstract
An object of the present invention is to provide a good cleaning liquid for semiconductor device which is used after a CMP step, and the present invention relates to a cleaning liquid for semiconductor device containing the following components (1) to (5) or (1)' to (4)′: