The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2018
Filed:
Mar. 12, 2015
Applicant:
Mitsubishi Materials Corporation, Tokyo, JP;
Inventors:
Assignee:
MITSUBISHI MATERIALS CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C04B 35/491 (2006.01); C04B 35/622 (2006.01); C04B 35/624 (2006.01); C04B 35/626 (2006.01); C04B 35/632 (2006.01); C04B 35/634 (2006.01); C04B 35/64 (2006.01); H01L 41/187 (2006.01); H01L 41/318 (2013.01);
U.S. Cl.
CPC ...
C04B 35/491 (2013.01); C04B 35/624 (2013.01); C04B 35/6264 (2013.01); C04B 35/62218 (2013.01); C04B 35/632 (2013.01); C04B 35/63444 (2013.01); C04B 35/64 (2013.01); H01L 41/1876 (2013.01); H01L 41/318 (2013.01); C04B 2235/3234 (2013.01); C04B 2235/3249 (2013.01); C04B 2235/3255 (2013.01); C04B 2235/3268 (2013.01); C04B 2235/3296 (2013.01); C04B 2235/606 (2013.01); C04B 2235/6567 (2013.01); C04B 2235/96 (2013.01);
Abstract
A composition used for forming a PZT-based piezoelectric film formed of Mn and Nb co-doped composite metal oxides is provided, in which the composition includes PZT-based precursors so that a metal atom ratio (Pb:Mn:Nb:Zr:Ti) in the composition satisfies (1.00 to 1.25):(0.002 to 0.056):(0.002 to 0.056):(0.40 to 0.60):(0.40 to 0.60), a rate of Mn is from 0.20 to 0.80 when the total of metal atom rates of Mn and Nb is 1, a rate of Zr is from 0.40 to 0.60 when the total of metal atom rates of Zr and Ti is 1, and the total rate of Zr and Ti is from 0.9300 to 0.9902 when the total of metal atom rates of Mn, Nb, Zr, and Ti is 1.