The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 23, 2018

Filed:

May. 22, 2014
Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Taku Mizutani, Tokyo, JP;

Ichiro Namioka, Tokyo, JP;

Toshihiko Iijima, Tokyo, JP;

Shigenori Todate, Tokyo, JP;

Takahiro Ito, Yamanashi, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/042 (2006.01); G05B 19/418 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G05B 19/0421 (2013.01); G05B 19/41865 (2013.01); H01L 21/67276 (2013.01); G05B 2219/2205 (2013.01); Y02P 80/114 (2015.11); Y02P 90/14 (2015.11); Y02P 90/20 (2015.11); Y02P 90/28 (2015.11); Y02P 90/86 (2015.11);
Abstract

A manufacturing process system includes: a plurality of processing devices which processes workpieces, with respective equipment associated with the plurality of processing devices; a transfer device which transfers the workpieces to the plurality of processing devices; a host computer which performs creating a transfer plan including information of timings at which the workpieces are carried in and out by the transfer device and acquiring an operation schedule including information of maintenance time from the plurality of processing devices; and a processing device group controller which performs acquiring the transfer plan and the operation schedule from the host computer, comparing the transfer plan and the operation schedule of each processing device, specifying the last process before maintenance for each processing device, detecting the end timing of the specified process, and instructing each processing device to be switched to an idle state at the end timing along with the associated equipment.


Find Patent Forward Citations

Loading…