The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2018
Filed:
Nov. 13, 2013
Applicants:
L'air Liquide, Societe Anonyme Pour L'etude ET L'exploitation Des Procedes Georges Claude, Paris, FR;
Clement Lansalot-matras, Seocho-gu, Seoul, KR;
Wontae Noh, Jung-gu, Seoul, KR;
Jooho Lee, Gajaeul-ro, Seodaemun-gu, Seoul, KR;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/18 (2006.01); C23C 16/455 (2006.01); C01G 33/00 (2006.01); C07F 9/00 (2006.01); C09D 5/24 (2006.01); H01L 21/02 (2006.01); H01L 21/285 (2006.01); C23C 16/452 (2006.01);
U.S. Cl.
CPC ...
C23C 16/18 (2013.01); C01G 33/00 (2013.01); C07F 9/005 (2013.01); C09D 5/24 (2013.01); C23C 16/45536 (2013.01); C23C 16/45553 (2013.01); H01L 21/0228 (2013.01); H01L 21/02175 (2013.01); H01L 21/02208 (2013.01); H01L 21/02271 (2013.01); H01L 21/28556 (2013.01); H01L 21/28568 (2013.01); C01P 2006/40 (2013.01); C23C 16/452 (2013.01);
Abstract
Disclosed are Group 5 transition metal-containing thin film forming precursors. Also disclosed are methods of synthesizing and using the disclosed precursors to deposit Group 5 transition metal-containing thin films on one or more substrates via vapor deposition processes.