The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2018
Filed:
Jun. 12, 2017
Lasertec Corporation, Yokohama, JP;
Teruaki Yamazaki, Yokohama, JP;
Hiroyuki Jitsukawa, Yokohama, JP;
Lasertec Corporation, Yokohama, JP;
Abstract
A measurement apparatusaccording to the present invention includes a tablethat has an axis of rotationand supports a disc-shaped object, a first driving unit that rotates the tablearound the axis of rotation, a light sourcethat produces illumination light with which an end portionof the disc-shaped objectis illuminated, an objective lensthat collects the illumination light reflected from the end portion, a second driving unit that moves the objective lensalong an optical axis, an imaging unitthat captures an image of the end portionby detecting the reflected light collected by the objective lens, and an autofocus optical systemthat determines a position of the objective lenswhere the image of the end portionis brought into focus in the imaging unit
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile