The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2018
Filed:
Nov. 19, 2017
Applicant:
Matheson Tri-gas, Inc., Basking Ridge, NJ (US);
Inventors:
Joseph Vininski, Boulder, CO (US);
Dane Scott, Doylestown, PA (US);
Assignee:
Matheson Tri-Gas, Inc., Basking Ridge, NJ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/036 (2006.01); H01S 3/225 (2006.01); H01S 3/104 (2006.01); H01S 3/22 (2006.01);
U.S. Cl.
CPC ...
H01S 3/036 (2013.01); H01S 3/104 (2013.01); H01S 3/225 (2013.01); H01S 3/2207 (2013.01); H01S 3/2251 (2013.01); H01S 3/2255 (2013.01);
Abstract
The present invention relates to a system for recirculating the gas atmosphere within an excimer laser system, where contaminates, created in the laser's operation, are removed, and the gas concentrations of additive gases, such as Xe, Kr, or others, depleted in the laser operation, are rebalanced to specific lasing mixtures by analyzation and component replenishment from one or more external supplies.