The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 16, 2018

Filed:

May. 30, 2017
Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Shinichi Fujisawa, Tokyo, JP;

Ryoji Tanimoto, Tokyo, JP;

Assignee:

Disco Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76862 (2013.01); H01L 21/0231 (2013.01); H01L 21/02348 (2013.01); H01L 21/67115 (2013.01); H01L 21/67132 (2013.01); H01L 21/76825 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/68381 (2013.01);
Abstract

An expansion sheet is adapted to be held and expanded by an expanding apparatus when a platelike workpiece is attached to the expansion sheet. The expansion sheet has a peripheral area around the workpiece where the expansion sheet is adapted to be held by first, second, third, and fourth holding units that are moveable away from each other. The expansion sheet includes a base sheet and an adhesive layer formed on the base sheet, the adhesive layer having adhesion adapted to be reduced by applying ultraviolet light. The adhesion of the adhesive layer in the peripheral area of the expansion sheet is lower than that in the other area of the expansion sheet.


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