The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2018
Filed:
Jan. 26, 2018
Disco Corporation, Tokyo, JP;
Satoshi Odaira, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A processing apparatus includes a cassette rest unit from which a wafer is fed by an unloading unit and a feed unit to a plurality of processing units, in which the layout of the units can be changed. The processing unit also has a control unit including a display panel for displaying an input screen for entering operating conditions for the units and a memory unit configured to store at least the operating conditions for the units. The memory unit includes an image memory for storing respective plan-view images of the units, and the display panel displays an overall apparatus map representing a combination of the plan-view images of the units as a layout of the processing apparatus in its entirety. The layout of the plan-view images of the units in the overall apparatus map can be changed.