The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2018
Filed:
Mar. 31, 2017
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/268 (2006.01); H01L 21/324 (2006.01); H01S 5/42 (2006.01); H01S 5/042 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); H01L 21/268 (2013.01); H01L 21/324 (2013.01); H01S 5/042 (2013.01); H01S 5/423 (2013.01);
Abstract
The invention relates to an apparatus for manufacturing a semiconductor device comprising a reaction chamber comprising a substrate holder for holding a substrate; and, a heater for heating the substrate. The heater may comprise a vertical cavity surface emitting laser constructed and arranged to emit a radiation beam to a substrate held by the substrate holder to heat the substrate.
Published as:
US2018286711A1; WO2018178771A1; US10103040B1; TW201838113A; CN110494968A; KR20190135003A; JP2020516059A; TWI762585B; JP7097383B2; KR102500125B1; CN110494968B;