The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2018
Filed:
Jan. 12, 2016
Applicant:
Fei Company, Hillsboro, OR (US);
Inventor:
Clive D. Chandler, Portland, OR (US);
Assignee:
FEI COMPANY, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 21/461 (2006.01); B44C 1/22 (2006.01); C03C 15/00 (2006.01); C03C 25/68 (2006.01); C23F 1/00 (2006.01); H01J 37/32 (2006.01); H01L 21/02 (2006.01); H01L 39/24 (2006.01); H01J 37/305 (2006.01); H01L 21/306 (2006.01); H01L 21/3065 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32522 (2013.01); H01J 37/3056 (2013.01); H01J 37/3244 (2013.01); H01J 37/32715 (2013.01); H01L 21/02315 (2013.01); H01L 21/02689 (2013.01); H01L 21/3065 (2013.01); H01L 21/30621 (2013.01); H01L 39/2477 (2013.01); H01J 2237/08 (2013.01); H01J 2237/2002 (2013.01); H01J 2237/3174 (2013.01); H01J 2237/31745 (2013.01); H01J 2237/3341 (2013.01);
Abstract
A micromachining process includes exposing the work piece surface to a precursor gas including a compound having an acid halide functional group; and irradiating the work piece surface with a beam in the presence of the precursor gas, the precursor gas reacting in the presence of the particle beam to remove material from the work piece surface.