The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2018
Filed:
May. 20, 2016
Carl Zeiss Microscopy Gmbh, Jena, DE;
Bjoern Gamm, Koenigsbronn, DE;
Pascal Frank, Essingen, DE;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
The invention relates to a method for generating an image of an object () using a particle beam device () generating a beam of charged particles. Moreover, the invention relates to a particle beam device () for carrying out this method. In particular, the particle beam device () is an electron beam device and/or an ion beam device. The method comprises selecting a desired value of a depth of field from a plurality of values of the depth of field by a user, wherein each value of the plurality of values of the depth of field is associated with a specific resolution of the particle beam device (), the specific resolution being achieved when using the desired value of the depth of field. Moreover, the method comprises adjusting the depth of field to the desired value of the depth of field by controlling at least one of: (i) a condenser lens (), (ii) a relative position of the object () to an objective lens () and (iii) a position of an aperture unit () and/or a size of an aperture unit opening (A,), and imaging the object () with the desired value of the depth of field and with the specific resolution associated with the value of the depth of field.