The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2018
Filed:
Jun. 13, 2017
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Yanko Sarov, Aalen, DE;
Markus Holz, Aalen, DE;
Fabian Haacker, Aalen, DE;
Mark Christof Wengler, Heindenheim an der Brenz, DE;
Markus Hauf, Ulm, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/08 (2006.01); G02B 5/09 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G02B 5/09 (2013.01); G02B 5/08 (2013.01); G03F 7/702 (2013.01); G03F 7/70075 (2013.01); G03F 7/70116 (2013.01); G03F 7/70908 (2013.01);
Abstract
A mirror device includes at least one electrically conductive shielding element, which forms a mechanism for producing an electric field in a region adjacent to at least one side surface and/or a rear side of a mirror body.