The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2018
Filed:
May. 06, 2015
Csmc Technologies Fab1 Co., Ltd., Wuxi New District, CN;
Dongbiao Qian, Wuxi, CN;
CSMC TECHNOLOGIES FAB1 CO., LTD., Wuxi New District, CN;
Abstract
Provided is a pressure sensor that includes a detection film that is arranged on a silicon substrate, detects a pressure applied to a surface thereof, and generates a protrusion deformation in response to the pressure. The pressure sensor also includes an optical transmitter and an optical detector that are arranged on the silicon substrate on opposite sides of the detection film and are located at a plane parallel to a plane comprising the detection film. The pressure sensor also includes a pressure calculation module that is connected to the optical detector and is used for acquiring light intensity data and calculating a pressure value according to the light intensity data. Also provided is a method of manufacturing the pressure sensor.