The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 16, 2018

Filed:

Feb. 28, 2017
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Arthur W. Ellis, Pleasantville, NY (US);

Richard A. Haight, Mahopac, NY (US);

James B. Hannon, Lake Lincolndale, NY (US);

Rudolf M. Tromp, North Salem, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/00 (2006.01); G01L 1/24 (2006.01); G01B 11/16 (2006.01);
U.S. Cl.
CPC ...
G01L 1/24 (2013.01); G01B 11/161 (2013.01);
Abstract

A force detector and method for using the same includes a lens. A cantilever is below the movable lens. A laser above the movable lens emits a beam of light through the movable lens, such that light reflects from the lens and the cantilever. A camera is configured to capture images produced by the light reflected from the lens and the light reflected from the cantilever. A processor is configured to determine a force between the movable lens and the cantilever based on a change in phase of the interference rings.


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