The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2018
Filed:
Apr. 12, 2016
Air Products and Chemicals, Inc., Allentown, PA (US);
Xiaoxi Wu, Encinitas, CA (US);
Sergei Vladimirovich Ivanov, Schnecksville, PA (US);
VERSUM MATERIALS US, LLC, Tempe, AZ (US);
Abstract
Condensable metal halide materials, such as but not limited to tungsten chloride (WCl), can be used to deposit metal films or metal containing films in a chemical vapor deposition (CVD) or atomic layer deposition process. Described herein are high purity compositions comprising condensable materials and methods to purify condensable materials. In one aspect, there is provided a composition comprising: tungsten hexachloride which is substantially free of at least one impurity and wherein the tungsten hexachloride comprises at least 90%, preferably 95% and more preferably 99% by weight or greater of a β-WCland 5% by weight or less of the α-WClas measured by X-ray diffraction.