The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 09, 2018

Filed:

Jan. 25, 2017
Applicant:

Mpi Corporation, Chu-pei, Hsinchu County, TW;

Inventors:

Lin-Lin Chih, Chu-pei, TW;

Chien-Hung Chen, Chu-pei, TW;

Cheng-Rong Yang, Chu-pei, TW;

Stojan Kanev, Chu-pei, TW;

Assignee:

MPI CORPORATION, Chu-Pei, Hsinchu County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/01 (2006.01); H01L 21/677 (2006.01); A47B 88/497 (2017.01); A47B 88/457 (2017.01); G01K 13/00 (2006.01); G01R 31/28 (2006.01); H01L 21/673 (2006.01); A47B 88/988 (2017.01);
U.S. Cl.
CPC ...
H01L 21/6773 (2013.01); A47B 88/457 (2017.01); A47B 88/497 (2017.01); G01K 13/00 (2013.01); G01R 31/2891 (2013.01); H01L 21/67346 (2013.01); H01L 21/67386 (2013.01); A47B 88/988 (2017.01);
Abstract

A wafer cassette includes a case, a plurality of wafer trays, and a plurality of transmission mechanisms. The wafer trays are disposed in the case. Each of the wafer trays includes a central opening, a first groove, and a second groove. The diameter of the second groove is greater than that of the first groove. A bottom surface of the second groove is higher than that of the first groove. The first and second grooves surround the central opening. Each of the transmission mechanisms is connected to the corresponding wafer tray to move the wafer tray between a pick-up position and a received position. Since the wafer tray has grooves with different diameters, the wafer tray is capable of receiving wafers with different sizes.


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