The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2018
Filed:
Feb. 24, 2016
Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai, CN;
Xiaoyu Jiang, Shanghai, CN;
Changgang Wang, Shanghai, CN;
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP)CO., LTD., Shanghai, CN;
Abstract
A reticle transfer apparatus includes a reticle, a reticle stage () and a robot (). The robot () is configured to support, transport and transfer the reticle onto the reticle stage (). The apparatus further includes: a first set of marks () and a second set of marks (), both provided on the reticle; a pre-alignment unit (), disposed on one side of the reticle stage () and configured to perform a first pre-alignment process by detecting the first set of marks () and perform a second pre-alignment process by detecting the second set of marks () during the transfer of the reticle; and a control unit, configured to adjust the position of the reticle relative to the reticle stage () based on the results of the first pre-alignment process such that the reticle is prevented from colliding with the reticle stage () and to adjust the position of the reticle relative to the reticle stage () based on the results of the second pre-alignment process such that the reticle is positioned in a predetermined range relative to the reticle stage (). A reticle transfer method is also disclosed.