The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2018
Filed:
May. 31, 2012
Applicants:
Yasushi Fujii, Kawasaki, JP;
Tatsuhiro Mitake, Kawasaki, JP;
Atsushi Matsushita, Kawasaki, JP;
Inventors:
Assignee:
TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 16/50 (2006.01); H01L 21/02 (2006.01); H01L 21/683 (2006.01); C23C 16/26 (2006.01); C23C 16/505 (2006.01);
U.S. Cl.
CPC ...
C23C 16/50 (2013.01); C23C 16/26 (2013.01); C23C 16/505 (2013.01); H01L 21/0212 (2013.01); H01L 21/02274 (2013.01); H01L 21/6835 (2013.01); H01L 2221/6834 (2013.01); H01L 2221/68318 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/68331 (2013.01); H01L 2221/68381 (2013.01); Y10T 428/31504 (2015.04);
Abstract
A method for forming a release layer which lies between a substrate and a supporting member and has a property that changes when the release layer absorbs light coming through the supporting member, by carrying out plasma CVD with a high-frequency power that is set so as to be higher than a power at which a mode jump occurs.