The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 09, 2018
Filed:
Sep. 19, 2016
Applicant:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Inventors:
Daijiro Mori, Kawasaki, JP;
Akira Kumazawa, Kawasaki, JP;
Assignee:
TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09D 7/00 (2018.01); C09D 7/63 (2018.01); B08B 3/04 (2006.01); C09D 5/00 (2006.01); H01L 21/02 (2006.01); H01L 21/306 (2006.01); H01L 21/3105 (2006.01); G03F 7/40 (2006.01); C08K 5/34 (2006.01);
U.S. Cl.
CPC ...
C09D 7/63 (2018.01); B08B 3/04 (2013.01); C09D 5/00 (2013.01); G03F 7/405 (2013.01); H01L 21/02057 (2013.01); H01L 21/306 (2013.01); H01L 21/3105 (2013.01); H01L 21/31058 (2013.01); C08K 5/34 (2013.01);
Abstract
A surface treatment agent capable of effectively preventing pattern collapse of an inorganic pattern or a resin pattern provided on a substrate, and a surface treatment method using such a surface treatment agent. The surface treatment agent includes a silylation agent and a nitrogen-containing heterocyclic compound which does not include a silicon atom.