The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2018
Filed:
Aug. 08, 2016
Applicant:
Shuz Tung Machinery Industrial Co., Ltd., Taichung, TW;
Inventors:
Chun-Chih Chuang, Taichung, TW;
Yung-Peng Hu, Taichung, TW;
Assignee:
SHUZ TUNG MACHINERY INDUSTRIAL CO., LTD., Taichung, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03B 27/54 (2006.01); H05K 3/34 (2006.01); G03F 7/20 (2006.01); H05K 3/00 (2006.01);
U.S. Cl.
CPC ...
H05K 3/3452 (2013.01); G03F 7/70858 (2013.01); G03F 7/70933 (2013.01); H05K 3/0023 (2013.01); H05K 3/0026 (2013.01); H05K 2203/107 (2013.01);
Abstract
A laser direct imaging system includes a stage, a laser device and an oxygen-reducing device. The stage is subjected to an atmospheric pressure. The laser device is configured to provide a laser beam to scan across the substrate. The oxygen-reducing device operates simultaneously with the laser device for outputting an inert gas only to a specific area where the laser beam is being aimed such that any portion of the substrate, if enters the specific area, will be exposed to the laser beam under a low-oxygen environment.