The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2018
Filed:
Mar. 10, 2017
Applicant:
Toshiba Memory Corporation, Minato-ku, JP;
Inventor:
Shingo Nakajima, Yokkaichi, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11573 (2017.01); H01L 27/11582 (2017.01); H01L 27/11565 (2017.01); H01L 21/28 (2006.01); H01L 21/311 (2006.01); H01L 27/11568 (2017.01); H01L 21/768 (2006.01); H01L 23/528 (2006.01); H01L 23/522 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 21/28282 (2013.01); H01L 21/31111 (2013.01); H01L 21/76897 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 27/11565 (2013.01); H01L 27/11568 (2013.01); H01L 27/11573 (2013.01);
Abstract
An integrated circuit device includes an insulating film, a contact extending in a first direction and being provided inside the insulating film, and an insulating member. A composition of the insulating member is different from a composition of the insulating film. A level difference is formed in a side surface of the contact, a portion of a region of the side surface other than the level difference contacts the insulating film. The insulating member contacts the level difference.