The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2018
Filed:
Mar. 09, 2015
Shinko Electric Industries Co., Ltd., Nagano-ken, JP;
Akihiro Kuribayashi, Nagano, JP;
Shinko Electric Industries Co., LTD., Nagano-Ken, JP;
Abstract
A temperature adjustment device includes a holding plate having a placing surface on which a processed substrate is placed. The holding plate includes a heating element capable of heating the processed substrate placed on the placing surface. A base plate that supports the holding plate includes first through holes extending through the base plate in a thickness direction. An adhesive layer, which adheres the base plate and the holding plate, includes second through holes that are respectively in communication with the first through holes. Adjustment rods are respectively inserted into the first through holes. Each of the adjustment rods includes a distal end located in a corresponding one of the second through holes.