The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2018
Filed:
Apr. 21, 2016
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Petri Raisanen, Gilbert, AZ (US);
Eric Shero, Phoenix, AZ (US);
Suvi Haukka, Helsinki, FI;
Robert Brennan Milligan, Phoenix, AZ (US);
Michael Eugene Givens, Scottsdale, AZ (US);
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/38 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/38 (2013.01); C23C 16/45523 (2013.01); C23C 16/45525 (2013.01);
Abstract
A method for depositing a metal boride film onto a substrate is disclosed. In particular, the method comprises pulsing a metal halide precursor onto the substrate and pulsing a boron compound precursor onto the substrate. A reaction between the metal halide precursor and the boron compound precursor forms a metal boride film. Specifically, the method discloses forming a tantalum boride (TaB) or a niobium boride (NbB) film.
Published as:
US2017306478A1; KR20170120499A; TW201807242A; US10087522B2; TWI737693B; KR20220115895A; KR102478048B1;