The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 25, 2018

Filed:

Apr. 26, 2017
Applicant:

Fujitsu Limited, Kawasaki-shi, Kanagawa, JP;

Inventors:

Shirou Ozaki, Yamato, JP;

Naoya Okamoto, Isehara, JP;

Assignee:

FUJITSU LIMITED, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/036 (2006.01); H01L 29/66 (2006.01); H01L 21/02 (2006.01); H01L 21/28 (2006.01); H01L 29/20 (2006.01); H01L 29/205 (2006.01); H01L 29/778 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66462 (2013.01); H01L 21/0214 (2013.01); H01L 21/0223 (2013.01); H01L 21/02178 (2013.01); H01L 21/02252 (2013.01); H01L 21/28264 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01); H01L 29/7787 (2013.01);
Abstract

A semiconductor device includes a first semiconductor layer formed of a nitride semiconductor, on a substrate; a second semiconductor layer formed of a nitride semiconductor, on the first semiconductor layer; a source electrode and a drain electrode formed on the second semiconductor layer; a first insulating film formed on the second semiconductor layer; a second insulating film formed on the first insulating film; and a gate electrode formed on the second insulating film. The first insulating film includes a nitride film formed on a side of the second semiconductor layer, and an oxynitride film formed on the nitride film, and the second insulating film is formed of an oxide.


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