The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2018
Filed:
Aug. 19, 2009
Jones Alami, Bergisch-Gladbach, DE;
Georg Erkens, Aachen, DE;
Tariq Rasa, Aachen, DE;
Jörg Vetter, Bergisch Gladbach, DE;
Jones Alami, Bergisch-Gladbach, DE;
Georg Erkens, Aachen, DE;
Tariq Rasa, Aachen, DE;
Jörg Vetter, Bergisch Gladbach, DE;
OERLIKON SURFACE SOLUTIONS AG, PFAEFFIKON, Pfäffikon SZ, CH;
Abstract
The invention relates to a physical vapor deposition coating device (), comprising a process chamber () with an anode () and a consumable cathode () to be consumed by an electrical discharge for coating a substrate located within the process chamber (). The coating device () further includes a first electrical energy source () being connected with its negative pole to said consumable cathode (), and a second electrical energy source () being connected with its positive pole to said anode (). According to the invention, a third electrical energy source () is provided being connected with its negative pole to a source cathode () which is different from the consumable cathode (). In addition, the invention relates to a physical vapor deposition method for coating a substrate.