The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2018
Filed:
Mar. 17, 2017
Applicant:
Intel Corporation, Santa Clara, CA (US);
Inventors:
Masaki Kurokawa, Tokyo, JP;
Takamasa Sato, Tokyo, JP;
Shinichi Kojima, Tokyo, JP;
Akio Yamada, Tokyo, JP;
Assignee:
INTEL CORPORATION, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/14 (2006.01); H01J 37/147 (2006.01); H01J 37/317 (2006.01); H01J 37/24 (2006.01);
U.S. Cl.
CPC ...
H01J 37/147 (2013.01); H01J 37/241 (2013.01); H01J 37/3177 (2013.01); H01J 2237/141 (2013.01); H01J 2237/152 (2013.01); H01J 2237/1504 (2013.01); H01J 2237/1526 (2013.01); H01J 2237/20285 (2013.01);
Abstract
A multicolumn charged particle beam exposure apparatus includes a plurality of column cells which generate charged particle beams, and the column cell includes a yoke which is made of a magnetic material and generates a magnetic field of a predetermined intensity distribution around an optical axis of the column, and a coil which is wound around the yoke. The coil includes a plurality of divided windings, which are driven by different power sources.