The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 25, 2018
Filed:
Jun. 06, 2014
Tokyo Electron Limited, Tokyo, JP;
Mitsuyoshi Miyazono, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A prober in which a probe head can be easily replaced is provided. A proberincludes a main body; a stageprovided within the main bodyand configured to place a wafer W thereon; a cardprovided within the main bodyto face the stage; and a probe head holderprovided within the main bodyand configured to be moved toward the card. The cardincludes a probe headwhich is detachably attached to the cardand has a multiple number of probe needles, and the probe head holderis moved toward the cardwhile holding the probe headthereon.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile