The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2018
Filed:
Feb. 25, 2015
Applicant:
Fujitsu Limited, Kawasaki-shi, Kanagawa, JP;
Inventors:
Daiyu Kondo, Atsugi, JP;
Haruhisa Nakano, Tsuchiura, JP;
Assignee:
FUJITSU LIMITED, Kawasaki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/762 (2006.01); H01L 23/532 (2006.01); H01L 29/16 (2006.01); H01L 29/66 (2006.01); H01L 21/285 (2006.01); H01L 21/768 (2006.01); H01L 21/02 (2006.01); H01L 21/04 (2006.01); H01L 29/778 (2006.01); H01L 29/786 (2006.01); H01L 29/45 (2006.01); H01L 29/49 (2006.01); H01L 29/51 (2006.01);
U.S. Cl.
CPC ...
H01L 23/53276 (2013.01); H01L 21/0262 (2013.01); H01L 21/02491 (2013.01); H01L 21/02527 (2013.01); H01L 21/043 (2013.01); H01L 21/044 (2013.01); H01L 21/28512 (2013.01); H01L 29/1606 (2013.01); H01L 29/66045 (2013.01); H01L 29/66742 (2013.01); H01L 29/778 (2013.01); H01L 29/78684 (2013.01); H01L 21/76885 (2013.01); H01L 29/45 (2013.01); H01L 29/49 (2013.01); H01L 29/4966 (2013.01); H01L 29/517 (2013.01); H01L 2221/1094 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A method of manufacturing a graphene film manufactures a graphene film in good state without generating wrinkles and stresses and leaving residues of the resin. The method of manufacturing a graphene film comprises forming a catalyst metal film on a substrate; synthesizing a graphene film on the catalyst metal film; and removing the metal catalyst film in an oxidation atmosphere of an oxidizer and transferring the graphene film to the substrate.