The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 18, 2018

Filed:

Jul. 20, 2016
Applicant:

Fei Company, Hillsboro, OR (US);

Inventors:

Andrew Kingston, Kambah, AU;

Shane Latham, Griffith, AU;

Adrian Sheppard, Fisher, AU;

Glenn Myers, Waramanga, AU;

Benoit Recur, Turner, AU;

Heyang Li, Harrison, AU;

Assignee:

FEI Company, Hillsboro, OR (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G01N 23/046 (2018.01); H01J 37/26 (2006.01); G06T 11/00 (2006.01);
U.S. Cl.
CPC ...
G01N 23/046 (2013.01); G06T 11/006 (2013.01); H01J 37/26 (2013.01); G01N 2223/401 (2013.01); G01N 2223/418 (2013.01); G01N 2223/419 (2013.01);
Abstract

A method of investigating a specimen using a tomographic imaging apparatus, by performing, in multiple iterations, the following steps:


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