The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 11, 2018

Filed:

Nov. 02, 2016
Applicant:

Iqe, Plc, St. Mellons, Cardiff, GB;

Inventors:

Rodney Pelzel, Emmaus, PA (US);

Rytis Dargis, Oak Ridge, NC (US);

Andrew Clark, Mountain View, CA (US);

Howard Williams, Cardiff, GB;

Patrick Chin, Zhubei, TW;

Michael Lebby, San Francisco, CA (US);

Assignee:

IQE, PLC, St. Mellons, Cardiff, GB;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/06 (2006.01); H03H 1/00 (2006.01); H01L 21/00 (2006.01); H01L 29/737 (2006.01); H01L 23/66 (2006.01); H01L 29/66 (2006.01); H01L 29/778 (2006.01); H01L 41/08 (2006.01); H01L 41/083 (2006.01); H01L 41/319 (2013.01); H03H 3/02 (2006.01); H03H 3/08 (2006.01); H03H 9/17 (2006.01);
U.S. Cl.
CPC ...
H03H 1/0007 (2013.01); H01L 23/66 (2013.01); H01L 27/0688 (2013.01); H01L 29/66242 (2013.01); H01L 29/66431 (2013.01); H01L 29/737 (2013.01); H01L 29/778 (2013.01); H01L 41/083 (2013.01); H01L 41/0815 (2013.01); H01L 41/319 (2013.01); H03H 3/02 (2013.01); H03H 3/08 (2013.01); H03H 9/175 (2013.01); H01L 2223/6672 (2013.01); H03H 2001/0064 (2013.01); H03H 2001/0085 (2013.01); H03H 2003/025 (2013.01);
Abstract

Layer structures for RF filters can be fabricated using rare earth oxides and epitaxial aluminum nitride, and methods for growing the layer structures. A layer structure can include an epitaxial crystalline rare earth oxide (REO) layer over a substrate, a first epitaxial electrode layer over the crystalline REO layer, and an epitaxial piezoelectric layer over the first epitaxial electrode layer. The layer structure can further include a second electrode layer over the epitaxial piezoelectric layer. The first electrode layer can include an epitaxial metal. The epitaxial metal can be single-crystal. The first electrode layer can include one or more of a rare earth pnictide, and a rare earth silicide (RESi).


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