The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 11, 2018

Filed:

Nov. 16, 2016
Applicant:

Gigaphoton Inc., Tochigi, JP;

Inventors:

Osamu Wakabayashi, Oyama, JP;

Masaki Arakawa, Oyama, JP;

Kouji Kakizaki, Oyama, JP;

Assignee:

Gigaphoton Inc., Tochigi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/10 (2006.01); H01S 3/13 (2006.01); G01J 1/42 (2006.01); H01S 3/00 (2006.01); H01S 3/139 (2006.01); H01S 3/23 (2006.01); H01S 3/225 (2006.01);
U.S. Cl.
CPC ...
H01S 3/1305 (2013.01); G01J 1/4257 (2013.01); H01S 3/0014 (2013.01); H01S 3/1394 (2013.01); H01S 3/2383 (2013.01); G01J 2001/4261 (2013.01); H01S 3/005 (2013.01); H01S 3/0071 (2013.01); H01S 3/225 (2013.01);
Abstract

The laser system may include a plurality of laser apparatuses, a beam delivery device configured to bundle pulse laser beams emitted from respective laser apparatuses of the plurality of laser apparatuses to emit a bundled pulse laser beam, and a beam parameter measuring device provided in an optical path of the bundled pulse laser beam to measure a beam parameter of each one of the pulse laser beams and a beam parameter of the bundled pulse laser beam.


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