The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2018
Filed:
Sep. 30, 2015
Siqi Luo, Ladera, CA (US);
Richard Carl Ujazdowski, Poway, CA (US);
Walter Dale Gillespie, Poway, CA (US);
Thomas Patrick Duffey, San Diego, CA (US);
Siqi Luo, Ladera, CA (US);
Richard Carl Ujazdowski, Poway, CA (US);
Walter Dale Gillespie, Poway, CA (US);
Thomas Patrick Duffey, San Diego, CA (US);
Cymer, LLC, San Diego, CA (US);
Abstract
Anodes and cathodes for use in generating gas discharge laser light are disclosed. The improved anode has a transition portion that includes a substantially vertical sidewall to transition between the active portion and the end portion to reduce erosion-related issues. The improved cathode has thickened spine portions in enhanced erosion locations. The spine portions are thickened by removing material from the shoulder of the cathode stepped cross-section profile in those locations in order to improve the longevity of the cathode.