The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2018
Filed:
Jul. 09, 2015
Applied Materials Israel Ltd., Rehovot OT, IL;
Chun-Hsiang Yen, Magong, TW;
Barak Dee-Noor, Herzelia, IL;
Yuval Gronau, Ramat Hasharon, IL;
Ronen Hagai, Kiryat Ekron, IL;
Efim Vinnitsky, Ashkelon, IL;
Yohanan Madmon, Kiryat Eqron, IL;
APPLIED MATERIALS ISRAEL LTD., Rehovot, IL;
Abstract
A system that may include a chamber, a motorized system, a chuck, a controller, multiple temperature sensors and a cooling module; wherein the chuck is configured to support an object that is positioned within the chamber; wherein the motorized system is configured to move the chuck in relation to the chamber; wherein the multiple temperature sensors are configured to sense multiple temperatures of at least one point within the chamber; wherein the cooling module is configured to cool a unit of the motorized system; and wherein the controller is configured to control the cooling module in response to the multiple temperatures.