The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 11, 2018
Filed:
Oct. 17, 2017
Kla-tencor Corporation, Milpitas, CA (US);
Uchicago Argonne Llc, Chicago, IL (US);
William M. Tong, San Francisco, CA (US);
Alan D. Brodie, Palo Alto, CA (US);
Jeffrey Elam, Elmhurst, IL (US);
Anil Mane, Naperville, IL (US);
KLA-Tencor Corporation, Milpitas, CA (US);
UChicago Argonne LLC, Chicago, IL (US);
Abstract
A digital pattern generator has a MEMS substrate with a plurality of doping layers and a plurality of insulating layers between respective doping layers. A plurality of lenslets are formed as holes through the substrate. A charge drain coating is applied to the inner surfaces of the lenslets. The charge drain coating drains electrons that come into contact with the charge drain coating so that the performance of the digital pattern generator will not be hindered by electron charge build-up. The charge drain coating includes a doping material that coalesces into clusters that are embedded within a high dielectric insulating material.