The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 04, 2018

Filed:

Jul. 05, 2017
Applicants:

James T. Kelliher, Baltimore, MD (US);

Monica P. Lilly, Frederick, MD (US);

Robert S. Howell, Silver Spring, MD (US);

Wayne Stephen Miller, Hanover, MD (US);

Patrick B. Shea, Alexandria, VA (US);

Matthew J. Walker, Glen Burnie, MD (US);

William J. Sweet, Baltimore, MD (US);

Inventors:

James T. Kelliher, Baltimore, MD (US);

Monica P. Lilly, Frederick, MD (US);

Robert S. Howell, Silver Spring, MD (US);

Wayne Stephen Miller, Hanover, MD (US);

Patrick B. Shea, Alexandria, VA (US);

Matthew J. Walker, Glen Burnie, MD (US);

William J. Sweet, Baltimore, MD (US);

Assignee:

Northrop Grumman Systems Corporation, Falls Church, VA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); H01L 29/76 (2006.01); H01L 51/05 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0533 (2013.01); H01L 51/0048 (2013.01); H01L 51/0566 (2013.01);
Abstract

One example includes a semiconductor device. The semiconductor device include a carbon nanotube substrate, a self-assembled monolayer, and a gate oxide. The self-assembled monolayer overlies the carbon nanotube substrate and is comprised of molecules each including a tail group, a carbon backbone, and a head group. The gate oxide overlies the self-assembled monolayer, wherein the self-assembled monolayer forms an interface between the carbon nanotube substrate and the gate oxide.


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