The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2018
Filed:
Oct. 11, 2016
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Kaushik Sah, Kessel Lo, BE;
Andrew James Cross, Altrincham, GB;
Assignee:
KLA-TENCOR CORPORATION, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06T 7/00 (2017.01); H01L 21/66 (2006.01); H01L 21/033 (2006.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); H01L 22/20 (2013.01); G06T 2207/30148 (2013.01); H01L 21/0332 (2013.01); H01L 21/0338 (2013.01); H01L 22/12 (2013.01);
Abstract
A design aware system, method, and computer program product are provided for detecting overlay-related defects in multi-patterned fabricated devices. In use, a design of a multi-patterned fabricated device is received by a computer system. Then, the computer system automatically determines from the design one or more areas of the design that are prone to causing overlay errors. Further, an indication of the determined one or more areas is output by the computer system to an inspection system for use in inspecting a multi-patterned device fabricated in accordance with the design.