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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10065402 B1

PDFFull Text
Date of Patent:
Sep. 04, 2018

Filed:

Feb. 03, 2016

Method of manufacturing pellicle assembly and method of photomask assembly including the same

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Mun Ja Kim, Suwon-si, KR;

Byung-Gook Kim, Seoul, KR;

Hwan Chul Jeon, Seoul, KR;

Ji-Beom Yoo, Seoul, KR;

Dong-Wook Shin, Changwon-si, KR;

Taesung Kim, Suwon-si, KR;

Sooyoung Kim, Suwon-si, KR;

Assignees:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-do, KR;

RESEARCH & BUSINESS FOUNDATION SUNGKYUNK WAN UNIVERSITY, Suwon-si, Gyeonggi-do, KR;

Attorney:

Lee & Morse, P.C.

Primary Examiner:

Sonya Mazumdar

Int. Cl.
CPC ...
B32B 37/14 (2006.01); B32B 38/18 (2006.01); B32B 37/00 (2006.01); G03F 1/62 (2012.01); B32B 37/10 (2006.01); B32B 38/10 (2006.01); B32B 37/12 (2006.01); H01L 21/00 (2006.01); B32B 38/16 (2006.01);
U.S. Cl.
CPC ...
B32B 37/025 (2013.01); G03F 1/62 (2013.01); B32B 37/0038 (2013.01); B32B 37/12 (2013.01); B32B 37/14 (2013.01); B32B 38/10 (2013.01); B32B 2038/166 (2013.01); B32B 2305/026 (2013.01); B32B 2457/08 (2013.01); H01L 21/00 (2013.01);
Abstract

A method of manufacturing a pellicle assembly, the method including attaching a carbon-containing thin film onto a transfer membrane in a wet atmosphere; attaching the carbon-containing thin film to a pellicle frame in a dry atmosphere while the carbon-containing thin film is attached onto the transfer membrane; and separating the transfer membrane from the carbon-containing thin film while the carbon-containing thin film is attached to the pellicle frame.

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