The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2018
Filed:
Jul. 20, 2015
Asml Netherlands B.v., Veldhoven, NL;
Johannes Antonius Gerardus Akkermans, Waalre, NL;
Ruud Antonius Catharina Maria Beerens, Roggel, NL;
Sander Christiaan Broers, Weert, NL;
Jeroen Johannes Theodorus Hendrikus De Best, Druten, NL;
Adrianus Marinus Wouter Heeren, St. Willebrord, NL;
George Alois Leonie Leenknegt, Waalre, NL;
Bo Lenssen, Belfeld, NL;
Hendrikus Johannes Schellens, Bergeijk, NL;
Peter Van Der Krieken, Boekel, NL;
Theodorus Petrus Maria Cadee, Asten, NL;
Jan Van Eijk, Eindhoven, NL;
Richard Henricus Adrianus Van Lieshout, Batenburg, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A sensor includes two shear-mode piezoelectric transducers, wherein each piezoelectric transducer has a bottom surface and a top surface, wherein the top surfaces of the piezoelectric transducers are rigidly connected to each other, and wherein the bottom surfaces of the piezoelectric transducers are configured to be attached to an object to be measured.