The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2018
Filed:
Oct. 19, 2012
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Markus Fischer, Bannewitz OT Gaustritz, DE;
Wolfram Karcher, Langebrueck, DE;
Barbara Jeansannetas, Ottobrunn, FR;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3407 (2013.01); C23C 14/54 (2013.01); H01J 37/32449 (2013.01); H01J 37/3482 (2013.01);
Abstract
A backing plate for a sputter target includes a target receiving part for receiving a target to be sputtered, and a structure for exposing the target receiving part through the backing plate.