The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 28, 2018

Filed:

Aug. 09, 2017
Applicant:

Robert Bosch Gmbh, Stuttgart, DE;

Inventors:

Achim Breitling, Reutlingen, DE;

Christof Schwenk, Glatten, DE;

Hartmut Kueppers, Reutlingen, DE;

Nicole Schittenhelm, Reutlingen, DE;

Volker Schmitz, Pfullingen, DE;

Assignee:

ROBERT BOSCH GMBH, Stuttgart, DE;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/20 (2006.01); H01L 29/84 (2006.01); B81B 7/00 (2006.01); B81B 7/02 (2006.01); B81C 1/00 (2006.01); G01P 3/00 (2006.01); G01P 15/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0038 (2013.01); B81B 7/02 (2013.01); B81C 1/00285 (2013.01); G01P 3/00 (2013.01); G01P 15/00 (2013.01);
Abstract

A micromechanical component having a main extension plane is provided; the micromechanical component encloses a first cavern and a second cavern, and a first pressure prevails in the first cavern while a second pressure prevails in the second cavern, and a first layer of the micromechanical component, which extends essentially parallel to the main extension plane, projects into a second layer of the micromechanical component, which extends essentially parallel to the main extension plane, between the first cavern and the second cavern, essentially in a perpendicular direction to the main extension plane.


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