The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 21, 2018

Filed:

Jan. 13, 2017
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Christian Schippel, Dresden, DE;

Andrei Sidelnicov, Dresden, DE;

Gerd Zschaetzsch, Dresden, DE;

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/10 (2006.01); H01L 29/06 (2006.01); H01L 29/40 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7824 (2013.01); H01L 29/0649 (2013.01); H01L 29/1083 (2013.01); H01L 29/1095 (2013.01); H01L 29/408 (2013.01);
Abstract

The present disclosure provides a semiconductor device structure including an active region having a semiconductor-on-insulator (SOI) configuration, a semiconductor device of lateral double-diffused MOS (LDMOS) type, a dual ground plane region formed by two well regions which are counter-doped to each other, the dual ground plane region extending below the semiconductor device, and a deep well region extending below the dual ground plane region. Herein, the semiconductor device of LDMOS type comprises a gate structure formed on the active region, a source region and a drain region formed in the active region at opposing sides of the gate structure, and a channel region and a drift region, both of which being formed in the active region and defining a channel drift junction, wherein the channel drift junction is overlain by the gate structure.


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