The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 21, 2018

Filed:

Jan. 18, 2017
Applicant:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Christian Arvet, Bernin, FR;

Nicolas Posseme, Sassenage, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/302 (2006.01); H01L 29/66 (2006.01); H01L 21/311 (2006.01); H01L 21/02 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66636 (2013.01); H01L 21/02238 (2013.01); H01L 21/31111 (2013.01); H01L 21/31116 (2013.01); H01L 21/76831 (2013.01);
Abstract

A method for manufacturing a transistor is provided, the transistor including a gate disposed above an underlying layer of a semiconductor material, the gate including at least one first flank and at least one second flank, and a gate foot disposed under the gate in the underlying layer and protruding relative to a peripheral portion of the underlying layer, the peripheral portion surrounding the gate foot; and the method including forming a selectivity layer obtained from an original layer and disposed only above the peripheral portion of the underlying layer, and selective etching, with respect to the selectivity layer, of the material of the original layer so as to etch the gate foot.


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