The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 21, 2018

Filed:

Jun. 22, 2017
Applicants:

Institut National DE LA Recherche Scientifique, Quebec, CA;

Plasmionique Inc., Brossard, CA;

Inventors:

Andreas Ruediger, Saint-Bruno-de-Montarville, CA;

Fabian Ambriz-Vargas, Montreal, CA;

Gitanjali Kolhatkar, Montreal, CA;

Reji Thomas, Kerala, IN;

Azza Hadj Youssef, Montreal, CA;

Rafik Nouar, Boucherville, CA;

Andranik Sarkissian, Brossard, CA;

Marc-André Gauthier, Saint-Bruno-de-Montarville, CA;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 27/11507 (2017.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11507 (2013.01); H01L 21/02181 (2013.01); H01L 21/02189 (2013.01); H01L 21/02194 (2013.01); H01L 21/02266 (2013.01); H01L 28/55 (2013.01); H01L 28/60 (2013.01);
Abstract

A method for fabricating a ferroelectric tunnel junction, comprising growing a hafnium zirconium oxide film barrier layer by sputtering in the presence of oxygen at a temperature of at most 425° C., on a conductive material as a bottom electrode, and depositing a conductive material as a top electrode.


Find Patent Forward Citations

Ruediger, Andreas. (2018). Ferroelectric tunnel junction and method of fabrication thereof (U.S. Patent No. 10056394). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10056394

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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