The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2018
Filed:
Aug. 11, 2014
Applicant:
Fei Company, Hillsboro, OR (US);
Inventor:
Corey Senowitz, San Diego, CA (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 14/30 (2006.01); G01N 1/32 (2006.01); H01J 37/305 (2006.01);
U.S. Cl.
CPC ...
C23C 14/30 (2013.01); G01N 1/32 (2013.01); H01J 37/3056 (2013.01); H01J 2237/208 (2013.01); H01J 2237/304 (2013.01); H01J 2237/31745 (2013.01);
Abstract
An improved method of preparing a TEM sample. A sample is extracted from a work piece and attached to a probe for transport to a sample holder. The sample is attached to the sample holder using charged particle beam deposition, and mechanically separated from probe by moving the probe and the sample holder relative to each other, without severing the connection using a charged particle beam.