The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 14, 2018

Filed:

Dec. 14, 2016
Applicant:

Gigaphoton Inc., Tochigi, JP;

Inventors:

Akiyoshi Suzuki, Oyama, JP;

Osamu Wakabayashi, Oyama, JP;

Masaki Arakawa, Oyama, JP;

Koji Ashikawa, Oyama, JP;

Yasuhiro Kamba, Oyama, JP;

Assignee:

Gigaphoton Inc., Tochigi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/23 (2006.01); H01S 3/081 (2006.01); H01S 3/00 (2006.01); G02B 27/12 (2006.01); G02B 27/10 (2006.01); H01L 21/67 (2006.01); H01L 21/02 (2006.01); H01L 27/12 (2006.01); B23K 26/00 (2014.01);
U.S. Cl.
CPC ...
H01S 3/23 (2013.01); B23K 26/0066 (2013.01); G02B 27/106 (2013.01); G02B 27/123 (2013.01); G02B 27/126 (2013.01); H01L 21/02532 (2013.01); H01L 21/02592 (2013.01); H01L 21/02686 (2013.01); H01L 21/67115 (2013.01); H01L 27/1285 (2013.01); H01S 3/0071 (2013.01); H01S 3/081 (2013.01);
Abstract

A laser system may include a plurality of laser apparatuses, a beam delivery device configured to bundle pulse laser beams emitted from respective laser apparatuses of the plurality of laser apparatuses to emit a bundled laser beam, and a controller configured to control operated laser apparatuses of the plurality of laser apparatuses such that, at a change in a number representing how many laser apparatuses are operated, a beam parameter of the bundled laser beam emitted from the beam delivery device approaches a beam parameter of the bundled laser beam emitted before the change.


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