The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2018
Filed:
Jul. 14, 2015
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Ingo Saenger, Heidenheim, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/72 (2006.01); G01J 4/04 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G01J 4/04 (2013.01); G03F 7/7085 (2013.01); G03F 7/70566 (2013.01);
Abstract
A polarization measuring device () for determining the polarization of a light beam () that includes a reflector () and a detector (). The reflector () is configured such that the plane of incidence of the light rays in the light beam () varies in a location-dependent manner, such that the reflector () reflects differing polarization components of the light beam () to different extents depending on the plane of incidence. The detector () serves to detect the differing polarization components.