The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 07, 2018

Filed:

Jul. 28, 2017
Applicant:

Asahi Glass Company, Limited, Chiyoda-ku, JP;

Inventors:

Iori Yoshida, Tokyo, JP;

Satoshi Takemiya, Tokyo, JP;

Hiroyuki Tomonaga, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/306 (2006.01); C09G 1/04 (2006.01); C30B 29/36 (2006.01); C30B 33/00 (2006.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
C09G 1/04 (2013.01); C30B 29/36 (2013.01); C30B 33/00 (2013.01); H01L 21/02024 (2013.01); H01L 29/1608 (2013.01); Y10T 428/24355 (2015.01);
Abstract

A process of manufacturing a single-crystal silicon-carbide substrate, includes contacting a surface of a single-crystal silicon-carbide plate with a surface of a polishing pad; and moving the surface of the single-crystal silicon-carbide plate relative to the surface of the polishing pad while supplying a polishing solution to the surface the polishing pad, to polish the surface of the single-crystal silicon-carbide plate. The polishing pad comprises a non-woven fabric or a porous resin. The polishing solution comprises an oxidizing agent which comprises a transition metal having oxidation-reduction potential of 0.5 V or more. Neither the polishing pad nor the polishing solution comprises an abrasive.


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