The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 07, 2018

Filed:

Dec. 02, 2015
Applicants:

Seok Heo, Hwaseong-si, KR;

Sun Ho Kim, Seoul, KR;

Chaemook Lim, Yongin-si, KR;

Jaechul Hwang, Seoul, KR;

Inventors:

Seok Heo, Hwaseong-si, KR;

Sun Ho Kim, Seoul, KR;

Chaemook Lim, Yongin-si, KR;

JaeChul Hwang, Seoul, KR;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25J 9/04 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B25J 9/042 (2013.01); B25J 9/041 (2013.01); H01L 21/67742 (2013.01);
Abstract

A substrate transfer unit includes a rotation body, an arm member, and first and second blades. The arm member is on the rotation body, and the first and second blades are on the arm member. The arm member includes a first arm including a lower link on the rotation body and an upper link connected on one side of the lower link and a second arm including a first portion and a second portion. The first portion has a first pivot on the other side of the upper link and is connected with the first blade at a first height from the first pivot. The second portion is connected with the first portion and with the second blade at a second height, higher than the first height, from the first pivot.


Find Patent Forward Citations

Loading…