The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 31, 2018

Filed:

Jan. 08, 2016
Applicant:

Infineon Technologies Austria Ag, Villach, AT;

Inventors:

Gilberto Curatola, Villach, AT;

Oliver Haeberlen, Villach, AT;

Gerhard Prechtl, Rosegg, AT;

Clemens Ostermaier, Villach, AT;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/778 (2006.01); H01L 29/66 (2006.01); H01L 21/66 (2006.01); H01L 29/20 (2006.01); H01L 29/205 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7784 (2013.01); H01L 22/26 (2013.01); H01L 29/2003 (2013.01); H01L 29/205 (2013.01); H01L 29/66462 (2013.01);
Abstract

A method includes providing a heterostructure body with a buffer region, and a barrier region disposed on the buffer region, and forming a gate structure for controlling the channel on the heterostructure body, the gate structure having a doped semiconductor region disposed on the heterostructure body, an interlayer disposed on the doped semiconductor region, and a gate electrode disposed on the interlayer. Forming the gate structure includes controlling a doping concentration of the doped semiconductor region such that a portion of the channel adjacent the gate structure is non-conductive at zero gate bias, and controlling electrical and geometrical characteristics of the interlayer based upon a relationship between the electrical and geometrical characteristics of the interlayer and corresponding effects on a static threshold voltage and a dynamic threshold voltage shift of the semiconductor device.


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