The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2018
Filed:
May. 15, 2017
Applicant:
Mapper Lithography Ip B.v., Delft, NL;
Inventors:
Alexander Hendrik Vincent Van Veen, Rotterdam, NL;
Willem Henk Urbanus, Delft, NL;
Assignee:
MAPPER LITHOGRAPHY IP B.V., Delft, NL;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); H01J 37/09 (2006.01); H01J 37/30 (2006.01); H01J 37/317 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); H01J 37/147 (2006.01); H01J 37/302 (2006.01);
U.S. Cl.
CPC ...
H01J 37/09 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); H01J 37/147 (2013.01); H01J 37/302 (2013.01); H01J 37/3007 (2013.01); H01J 37/3174 (2013.01); H01J 37/3177 (2013.01); H01J 2237/002 (2013.01); H01J 2237/026 (2013.01); H01J 2237/0262 (2013.01); H01J 2237/0264 (2013.01); H01J 2237/16 (2013.01); H01J 2237/182 (2013.01); H01J 2237/188 (2013.01);
Abstract
The invention relates to a charged particle beam generator. The generator may comprise a high voltage shielding arrangement () for shielding components outside the shielding arrangement from high voltages within the shielding arrangement, and a vacuum pump () located outside the shielding arrangement for regulating a pressure of a space within the shielding arrangement. The generator may comprise a collimator system with a cooling arrangement (-) comprising cooling channels inside electrodes of the collimator system.